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| PartNumber | D6F-20A61-000 | D6F-20A5-000 | D6F20A6000 |
| Description | Flow Sensors MEMS Airflow Sensor Air 0-20 LPM | Flow Sensors MEMS air 0-20L/min | Micro-Flow Senso |
| Manufacturer | Omron | Omron | - |
| Product Category | Flow Sensors | Flow Sensors | - |
| RoHS | Y | Y | - |
| Type | MEMS Mass Flow Sensor | MEMS Mass Flow Sensor | - |
| For Use With | Air | Air | - |
| Range | 0 L/min to 20 L/min | 0 L/min to 20 L/min | - |
| Accuracy | +/- 3 % Full Scale | +/- 3 % Full Scale | - |
| Output Voltage | 1 V to 5 V | 1 V to 5 V | - |
| Operating Supply Voltage | 10.8 V to 26.4 V | 10.8 V to 26.4 V | - |
| Housing Material | Thermoplastic (TP) | Thermoplastic (TP), Aluminum alloy | - |
| Series | D6F | D6F | - |
| Brand | Omron Electronics | Omron Electronics | - |
| Maximum Operating Temperature | + 60 C | + 60 C | - |
| Minimum Operating Temperature | - 10 C | - 10 C | - |
| Product Type | Flow Sensors | Flow Sensors | - |
| Factory Pack Quantity | 1 | 1 | - |
| Subcategory | Sensors | Sensors | - |
| Part # Aliases | 678887 D6F20A61000 | 1204013 653343 D6F20A5000 | - |
| Unit Weight | 3.633218 oz | 3.633218 oz | - |
| Port Size | - | 5 mm | - |
| Connection Method | - | 3 Wire Connector | - |
| Output Type | - | Analog | - |